Small Products
A diverse selection of handy equipment tailored for semiconductor applications
We offer a wide range of small products to handle from 75 to 300mm wafers, comprising table top equipment, vacuum handling systems (VHS), and open metal cassettes for thermal processes.
Tabletops
One of our legacy product lines, our table-top equipment is designed for 75 to 200mm wafer handling, including transfer tools, aligners, and elevators.
Through a technology license agreement with our European partner, EMU Technologies, we deliver updated designs without compromising the decades of proven field performance.
Batch ID Reader (IDWR200)
The IDWR (Batch ID Reader) aligns and reads the identification tag on a 150mm or 200mm wafer.
The system uses a Cognex 1741 Camera and is able to read Lasermarks or Datamatrix Tags on the active and rear faces of a wafer. Wafers are mapped prior to alignment and reading, checking for wafer presence cross and/or double slots.
The machine cycle time for reading a batch of 25 wafers is 2 minutes, including cassette mapping, batch alignment, and reading each wafer in the lot.
Vertical Batch Transfer & Aligner (VBT200A)
The VBT-A (Vertical Batch Transfer and Alignment machine) is a single stage, automated tool with ESD protection, which transfers a batch of wafers between semi-standard cassettes and aligns a batch of wafers by the notch or flat (also available between Semi-standard cassettes and Quartz Boats).
It is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).
The VBT-A has multiple functions within an incredibly small footprint and at an extremely competitive price.
Single Wafer Transfer (SPP150A-SPP200A
The SPPE is a Single Wafer Pick & Place machine, using a non-vacuum end effector to transfer wafers within or between cassettes with a throughput of 400wph. It’s the latest in the RECIF/EMU SPP range, installed globally since the late 1990s.
The SPPE maps cassettes for wafer presence, detects cross or double slots, and uses wafer safety sensors during loading and transfer. It handles multiple wafer thicknesses and cassettes with automated type detection or Operator Selection. Available for 75mm–200mm wafer handling, it provides true ESD protection for wafers and cassettes.
Batch Wafer Transfer (BPP150-200)
BPP is a table top, batch wafer pick-and-place tool that uses non-vacuum technology to transfer wafers between cassettes. Typically, the machine is supplied with 1 Load Port, but a 2 Load Port system is also available.
A host connection is available with BPP equipment.
BPP is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).
Notch Aligner (ANA/MNA/200)
The ANA (Automated Notch Aligner) and MNA (Manual Notch Aligner) align a batch of 200mm wafers by the notch. Wafers are aligned using the heavily industrialized alignment technology developed by RECIF, used in the multiple standalone and OEM systems.
Notch Finder Elevator (NFE200)
Batch Aligner and Elevators are a single stage tool that aligns wafers by the flat or notch and elevates them for inspection by the Operator.
Wafers are elevated from the carrier using 2 vacuum-free combs.
The Lighting Unit LED colour can be configured on request, but is usually supplied with Red or White LED’s.
Single Wafer Elevator (SWE150-200)
Selective Wafer Elevator is a manually activated tool used to elevate a wafer from a Semi-Standard carrier. The wafer is held in an elevated position until the mechanism is released.
The operator can select every fifth wafer to be elevated, starting at slot 1-5 (for example, every wafer in slot 1, 6, 11, 16, 21).
The open design and use of organic materials ensures ultra-clean handling without disturbing the laminar flow of the clean room.
Batch Slide Transfer (AWT/MWT/150-200)
Batch Slide Transfer machines push all wafers from one cassette to another. Manual or Automated options are available.
MWT (Manual Wafer Transfer) has a self-returning transfer arm, so the machine is always ready to use.
Flat Aligner (AFA/MFA 150)
Batch aligners align wafers by the flat or notch.
Wafers are aligned using the heavily industrialized alignment technology developed by RECIF Technologies, used in the multiple standalone and OEM systems.
On Flat Aligners, the post alignment angle can be selected through the user interface. Automatic starting on placement of a cassette can also be selected in the interface menu. A dual-flat machine is available, for end users wanting to align 47mm and 57mm flats on one machine.
Flat Finder Elevator (FFE150)
Batch Aligner and Elevators are a single stage tool that aligns wafers by the flat or notch and elevates them for inspection by the Operator.
Wafers are elevated from the carrier using 2 vacuum-free combs.
The Lighting Unit LED colour can be configured on request, but is usually supplied with Red or White LED’s.
Vacuum Handling Systems
The Vacuum Handling System (VHS), as our very first wafer handling solution from the 1980’s, is rooted in our heritage. This single-wafer manual handling lineup offers flexibility and precision for industrial activities and R&D or laboratories test & research.
Our VHS features patented vacuum tip designs using clean organic materials. It delivers exceptional cleanliness, configurability, and safety that support manual handling of wafers from 100mm to 300mm in diameter. All tips are interchangeable and available in different shapes, with various internal or external angles.
Vacuum Tips (EI Series)
Our vacuum tips have their own patented designs, suitable for 150 to 300mm wafers. It minimizes contact with the wafer, preventing deformation without compromising safety. Manufactured from clean organic material with optical polishing, all tips provide high level of cleanliness. Note that our wand is compatible with all the tips available in different shapes: with various internal or external angles.
Vacuum Wand (VSNOSD)
Our wand fits with all our tips. Its robust construction is made of PVDF and carbon fibers, featuring ESD protection, and a “normally open” design for ergonomic purpose: Vacuum ON per default, only push the button to cut the vacuum and drop off the wafer. In short: a handy and reliable solution for single-wafer handling.
Vacuum Tubes ([C]TSSD Series)
We offer 2 kinds of vacuum tubes—coiled tube in polyurethane or straight tube in silicon rubber. They are ESD safe and prevent from vacuum cut-off.
Stands (SPCH/V) & Quick-Disconnect (QDC)
To complete your VHS set, wand stands can be supplied to be mounted on a desk (SPCH) or to a wall (SPCV), as well as female quick disconnect for facility connection. The SPCH and SPCV stands, made from PVDF, incorporate an automatic vacuum cut-off system for enhanced safety and efficiency.
Metal Cassettes
Our Open Metal Cassettes are specialized for semiconductor thermal processes, offering optimal handling solutions with high mechanical performance. Constructed from a special aluminum alloy, these cassettes ensure up to 400°C process compliance, contamination prevention, and ergonomic ease of use. Available for various wafer sizes and customizable upon request, our metal cassettes adhere to SEMI standards and provide reliable solutions for thermal applications.
MC12/MC12-13 - 300mm Metal Cassettes
With their infopads and enhanced locking device option, our 300mm Metal cassettes are fully enabled for automation. Thus, they comply with SEMI E1.9, standard kinematic coupling (E57) and infopad usage. The standard MC-12LT is composed of 25 slots of 10mm pitch while the MC12LT-13s has 13 slots of 10mm pitch and so beneficiate of a smaller volume for narrower ovens.
MC4/MC6/MC8 – 100mm–200mm Metal Cassettes
Our cassettes for 100 to 200mm wafers offer compact dimensions optimized for these small diameters. To enhance their ergonomics, special handles and/or standard locking devices can be added.
